Search Results - lars haubold

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Single Beam Plasma Source

Executive SummaryPlasma-based ion sources are used in a variety of modern manufacturing processes, such as thin film deposition, etching, and surface engineering. Conventional linear ion sources have a race-track geometry that leads to a wide beam angle, limiting the ability to tune the ion-source interactions. Further advances in these processes require...
Published: 5/24/2019   |   Inventor(s): Qi Fan, Thomas Schuelke, Lars Haubold, Michael Petzold
Keywords(s):   Category(s): Devices, Manufacturing Equipment

System for Coating Inner Diameter Surface

Executive SummaryDiamond-like coatings offer a coating solution rivaled by few technologies available today. Capable of improving the durability and extending the lifetime of many metallic products, these coatings are typically applied in Physical Vapor Deposition (PVD) chambers. PVD processing is a line-of-sight process, meaning the distance between...
Published: 9/25/2018   |   Inventor(s): Thomas Schuelke, Michael Becker, Lars Haubold, Qi Hua Fan
Keywords(s):   Category(s): Advanced Materials, Manufacturing Equipment, Devices, Materials