MSU Technologies

MICROSCALE GAS BREAKDOWN DEVICE AND PROCESS

VAlue proposition

The microscale gas breakdown device that includes a cathode, an anode, and an engineered surface structure (e.g. protrusion) on the electrode is proposed. The breakdown characteristics of the device can be adjusted with flexibility by engineered surface morphology. By employing the engineered surface on the electrode, the breakdown characteristics transit from long-gap behavior at low pressure to short-gap behavior at high pressure, keeping the breakdown voltage relatively constant for a wide range of pressure or gap distance. The engineered electrode can be used to design gas breakdown devices with controlled breakdown voltage across many orders in pressure and gap size, which may be used in microscale device applications, including micro-switches and microchips.

Description of Technology

The microscale gas breakdown device is designed to control and manipulate electrical discharges at small scale. It consists of two primary surfaces that are separated by a defined gap distance. This gap is where the electrical breakdown occurs, allowing for the generation of controlled plasma or other phenomena dependent on the pressure conditions (high or low) surrounding the device. The device operates by applying either a current or a voltage across the two surfaces using a dedicated current source or voltage source. This electrical input triggers a discharge. The length and characteristics of the discharge paths are influenced by the perturbation's dimensions, which are based on the expected pressure environment surrounding the device. This design ensures that the device can adapt its discharge behavior dynamically, making it highly versatile for various applications. Its ability to operate efficiently under varying pressure conditions, combined with its low power consumption and high precision, makes it an attractive solution. The design provides a highly efficient, adaptable, and versatile solution for managing electrical discharges in a microscale environment with ability to dynamically respond to pressure variations.

Benefits