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Tunneling Electrical Contacts

Executive SummaryThe demand for smaller and more efficient electronic devices has driven semiconductor innovation over the past decade. Researchers have studied the nano and sub-nano scale Metal-Semiconductor, Metal-Insulator-Semiconductor, and Metal-Insulator-Metal (MIM) junctions to develop high performance contacts for integrated circuit design....
Published: 6/28/2018   |   Inventor(s): Peng Zhang, Sneha Banerjee, John Luginsland
Keywords(s):   Category(s): Devices, Electrical, Nanotechnology