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Single Beam Plasma Source

Executive SummaryPlasma-based ion sources are used in a variety of modern manufacturing processes, such as thin film deposition, etching, and surface engineering. Conventional linear ion sources have a race-track geometry that leads to a wide beam angle, limiting the ability to tune the ion-source interactions. Further advances in these processes require...
Published: 8/20/2022   |   Inventor(s): Qi Fan, Thomas Schuelke, Lars Haubold, Michael Petzold
Keywords(s):   Category(s): Devices, Manufacturing Equipment